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반도체 · 디스플레이용 검사 · 측정 장비

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TSV Depth Inspection

  • TSV Depth Inspection 이미지1 In-line Bump Inspection
    (CVI-5020EX-RA／CVI-7020-RA)
  • TSV Depth Inspection 이미지2 TSV Depth Inspection
    (TSV:Through Silicon Via)
    (TI-TSV-1005 / TI-TSV-0510)
  • TSV Depth Inspection 이미지3 In-line Bump Inspection
    (TVI-7020-RA)

3D Visual Inspection

  • 3D Visual Inspection 이미지1 FC-CSP Bump Inspection
    (RVI-8000)
  • 3D Visual Inspection 이미지2 Variable Temperature
    Substrate Warpage Inspection
    ( HVI-5020-EXKN HVI-5220-EXKN )
  • 3D Visual Inspection 이미지3 Substrate Sheet Bump Inspection
    (SVI-5020-EX/SVI-7020/SVI-6000)

Photo Mask Defect Inspection

  • LCM 고휘도·특수형 이미지 Photo Mask Defect Inspection

Photo Mask Defect Inspection

  • Photo Mask Defect Inspection 이미지 Thin-Film Thickness Inspection(ThIS-5001RS)